Abstract: Refractive index measurements have established themselves as the technique of choice for qualifying peroxide content in slurries for CMP of tungsten. Many emerging process flows use CMP as a ...
Concentration of Hydrogen Per Oxide(H2O2) Procedure: Step-1: Weight a sample such that there is no more than 0.06 gm of Hydrogen Per Oxide (H2O2) Step-2: Dilute with 50 ml of distill water and add 10 ...
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