Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

Practical process control techniques including tuning single proportional integral derivative controllers, choosing appropriate control loops for a processing plant and measurement instrumentation. An ...

Across the semiconductor industry, both FD-SOI and finFET transistor technologies are in high volume production, with IC manufacturers looking to extend both technologies to gain additional ...

When it comes to process-control systems, reliability is crucial and failure can be costly or dangerous. A combination of good design practices, component selection, and testing can enhance ...

Successful manufacturing is inextricably linked to process control. If processes are not controlled, the eventual output may not fall within the required parameters. Using baking as an example, when ...